Product overview
The CO₂ liquid Cleaner is a high-performance cleaning system that utilizes liquid CO₂ jet technology to remove microscopic contaminants from sensitive surfaces. Unlike traditional dry ice blasting, this system uses pressurized liquid carbon dioxide to deliver a gentler yet highly effective cleaning action — ideal for precision industries such as semiconductor, display panel, and PCB manufacturing.
By combining physical jet impact, thermal shock, and sublimation expansion, the CO₂ liquid Cleaner ensures efficient removal of organic and inorganic particles without moisture, abrasion, or residue, making it a preferred choice for cleanroom environments.
Technical specifications
| Item | Description |
|---|---|
| Machine Type | Mobile & Manual Cleaning |
| Main Module | Single Port (201) / Multi Port (202 / 204) |
| Nozzle Type | Pen Type / Bar Type |
| Cleaning Target | Glass and Display Surface Cleaning |
| Dimension (SM201) | W386 × D280 × H253 mm |
| Power Supply | 220VAC, 50/60Hz, 1 Phase, 5A |
| Compressed Air (CDA) | 5–8 kg/cm², Max. 3 m³/min |
| CO₂ Supply | Liquid CO₂ (≥6MPa, ≥–18°C) |
| CO₂ Consumption | Depends on nozzle configuration |
Applications
Semiconductor manufacturing: Wafer, CP/FT process cleaning
Display industry: Glass substrate and panel surface cleaning
Electronics assembly: PCB and micro-component cleaning
Optical and precision devices: Lens and optical part cleaning in cleanrooms

